Review of Compositional Measurement Accuracy in Laser-Assisted Atom Probe Tomography for Non-Metallic Materials
A comprehensive review article examines the accuracy and reliability of Laser-assisted Atom Probe Tomography (LA-APT) when measuring atomic composition in non-metallic materials and semiconductors. The work identifies key sources of compositional bias, particularly the role of surface electric fields, and reviews correction methods and assessment techniques. The findings establish best practices and recommendations for applying APT to new non-metallic materials systems.
This arXiv preprint presents a detailed review of compositional metrology using Laser-assisted Atom Probe Tomography, a technique increasingly used to study 3D atomic distributions in semiconductors and inorganic non-metallic solids. The authors address a frequently overlooked challenge: ensuring measurement accuracy in non-metallic systems, where compositional biases can significantly affect results. The review systematically examines the physical-chemical phenomena governing measurements, identifies specific loss mechanisms that introduce errors, and discusses methods for detecting and correcting compositional biases. By synthesizing the current state of knowledge on APT limitations in non-metallic materials, the work provides practical guidance for researchers and establishes recommendations for best practices in the field.
What's missing
The review's own acknowledged limitations and open questions regarding which non-metallic material systems remain most challenging for accurate APT analysis, and which correction methods are most effective for specific material classes.
What different sources said
- arXiv physicsCenter
Compositional Metrology of Atom Probe Applied to non-Metallic Materials
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